Reported results
|
Measurement range
|
Average thickness
|
10 to 1200 nm
|
Maximum thickness
|
10 to 1200 nm
|
Maximum thickness on 2,5 mm² area
|
10 to 1200 nm
|
Deposit volume
|
0 to 0.5 mm³
|
Technical specifications
|
Description
|
Test duration
|
Less than 15 minutes
|
Number of measurement points
|
1,200 points
|
Parameters saved with a test result
|
Sample type
Sample ID Date & Time Operator name Test Rig Identification used for the JFTOT phase JFTOT temperature Heater tube serial number Comments X and Y Coordinates for the standard spot localization Calibration information (tube serial number + date of calibration) Instrument serial number Software version |